Optimization models for semiconductor dopant profiling
Transport Phenomena and Kinetic Theory: Applications to Gases, Semiconductors, Photons, and Biological Systems, page 91-116 - 2006
BibTex references
@InProceedings{BHP06,
author = {Burger, M. and Hinze, M. and Pinnau, R.},
title = {Optimization models for semiconductor dopant profiling},
booktitle = {Transport Phenomena and Kinetic Theory: Applications to Gases, Semiconductors, Photons, and Biological Systems},
pages = {91-116},
year = {2006},
editor = {C.Cercignani, E.Gabetta},
publisher = {Birkh\äuser, Boston},
url = \{/2006/BHP06},
}
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